TSMC Lithography v3.1.0

TSMC N3E

major
3
TSMC N3B
minor
1
N3E
patch
0
TSMC N3E
suffix
โ€”
No suffix

Metadata

PropertyValue
NameTSMC N3E
Introduced2024
Feature size3 nm
TransistorFinFET, EUV
SourceCurated (lithography.json)

Uses (dependencies)

No dependencies.

Used by (0)

Nothing depends on this version.

Changelog

Since the previous minor (lower performance class): TSMC Lithography v3.0.0 (TSMC N3B)

No recorded differences.

Since the previous major (previous generation): TSMC Lithography v2.0.0 (TSMC N5)

Specifications

  • ~Feature size: 5 nm โ†’ 3 nm