Intel Lithography v3.0.0
1.5 µm CHMOS III
major
3
1.5 µm CHMOS III
minor
0
1500nm
patch
0
1.5 µm CHMOS III
suffix
—
No suffix
Metadata
| Property | Value |
|---|---|
| Name | 1.5 µm CHMOS III |
| Introduced | 1982 |
| Feature size | 1.5 µm |
| Transistor | planar CMOS |
| Source | Curated (lithography.json) |
Uses (dependencies)
No dependencies.
Used by (2)
Changelog
Since the previous major (previous generation): Intel Lithography v2.0.0 (3 µm HMOS)
Specifications
- ~Feature size: 3 µm → 1.5 µm
- ~Transistor: planar NMOS (HMOS) → planar CMOS